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TaC Coated wafer chuck
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Semixlab's TaC-coated wafer fixtures serve as critical wafer-holding components for silicon carbide (SiC) epitaxial growth processes, where success hinges on withstanding extreme temperatures, corrosive chemical environments, and ultra-tight process tolerances. Engineered for durability, cleanliness, and process repeatability, Semixlab's TaC-coated wafer holders support high-yield SiC manufacturing by enhancing epitaxial uniformity, extending maintenance intervals, and increasing equipment uptime in high-volume production environments.
Constructed from high-purity graphite substrate and precision-machined to ensure flatness, concentricity, and dimensional stability under thermal loading, the substrate is coated with a dense, high-purity tantalum carbide (TaC) layer. This forms a chemically inert, heat-resistant surface directly exposed to SiC wafers and reactive process environments. Tantalum carbide ranks among the most stable ceramic materials in semiconductor manufacturing, featuring a melting point exceeding 3880℃ and exceptional resistance to hydrogen, halogen-containing gases, and silicon vapors commonly present in SiC CVD and high-temperature epitaxial processes.
Within SiC epitaxy reactors, TaC-coated wafer holders play a pivotal role in maintaining thermal field stability and uniform wafer temperature across the entire growth surface. SiC epitaxy typically occurs at temperatures exceeding 1600℃, where even minute temperature gradients can cause growth rate inhomogeneities, dopant fluctuations, or crystalline defects like stacking faults. The TaC coating maintains surface integrity during prolonged high-temperature exposure, preventing corrosion, microcracks, or coating delamination.
Equally critical is the wafer holder's role in chemical isolation and contamination control. During SiC epitaxy, holders are continuously exposed to hydrogen-rich environments and chlorine-containing etchants. Traditional materials or lower-performance coatings are susceptible to chemical erosion under these c |
| Company: |
Semixlab Technology Co., Ltd,
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| Contact: |
Mr. nick wu |
| Address: |
No.9, Qianxi Road, Zhuji City, Shaoxing City, Zhejiang Province, China |
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| Tel: |
13126863256 |
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